JPH0329236U - - Google Patents

Info

Publication number
JPH0329236U
JPH0329236U JP9051989U JP9051989U JPH0329236U JP H0329236 U JPH0329236 U JP H0329236U JP 9051989 U JP9051989 U JP 9051989U JP 9051989 U JP9051989 U JP 9051989U JP H0329236 U JPH0329236 U JP H0329236U
Authority
JP
Japan
Prior art keywords
stage
movement
fine movement
thin fine
lifting stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9051989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9051989U priority Critical patent/JPH0329236U/ja
Publication of JPH0329236U publication Critical patent/JPH0329236U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP9051989U 1989-07-31 1989-07-31 Pending JPH0329236U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9051989U JPH0329236U (en]) 1989-07-31 1989-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9051989U JPH0329236U (en]) 1989-07-31 1989-07-31

Publications (1)

Publication Number Publication Date
JPH0329236U true JPH0329236U (en]) 1991-03-22

Family

ID=31640035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9051989U Pending JPH0329236U (en]) 1989-07-31 1989-07-31

Country Status (1)

Country Link
JP (1) JPH0329236U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011138938A1 (ja) * 2010-05-07 2011-11-10 Ｎｓｋテクノロジー株式会社 支持装置及び露光装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011138938A1 (ja) * 2010-05-07 2011-11-10 Ｎｓｋテクノロジー株式会社 支持装置及び露光装置
JP5702373B2 (ja) * 2010-05-07 2015-04-15 Ｎｓｋテクノロジー株式会社 支持装置及び露光装置

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